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GHG Measuring (Greenhouse Gas Abatement Facility Efficiency Measurement)

- What is Emission Trading?

Since January 1, 2015, Korea has been implementing the nation-wide greenhouse gas emission trading system for the first time in the world.
The GHG emission trading system means the GHG emission reduction system that utilizes the market function that allows the government to set the GHG emission allowance for the relevant company and achieve the reduction obligation through the sale of the emission rights


The National Institute of Environmental Research, under the Ministry of Environment, runs a verification session to verify accurate greenhouse gas emissions in the domestic electrical and electronics industries.
The study group, consisting of domestic greenhouse gas experts, announced a guide line based on domestic reality as a result of activities to establish a scientific standard methodology that is based on the estimation of GHG emissions in the relevant industries.
The greenhouse gas measurement methodology, which is expected to be an important criterion for estimating the greenhouse gas emissions of Korea’s main industries such as semiconductors and displays, is a practical and practical methodology considering domestic reality. It is also the only official measurement method in Korea that satisfies international measurement standards. It is expected to be.

- Guidelines for measuring efficiency of greenhouse gas reduction devices (Ministry of Environment)

This measurement guideline introduces Kr gas into the inlet for measuring the total flow at the inlet and outlet during the normal production process of the process facility (He gas can be used instead of Kr when the He is not used during the process) , The concentration of Kr gas is measured using QMS, and the removal efficiency (DRE) of the abatement facility is measured by measuring the concentration of F-GHG gas in FT-IR.


 Measuring methods are applicable to both individual abatement facilities and large-capacity integrated abatement facilities. Since the number of sample groups is large in the case of individual abatement facilities (Point Of Unit), some of the abatement facilities are sampled and monitored statistically. FT-IR and QMS measurements are performed simultaneously for 1 hour at the inlet and outlet The shorter the FT-IR measurement period (Δt) is, the better, but the maximum should not exceed 2 seconds. QMS measurement time for flow measurement QMS measurement can be stopped because there is no change in flow rate when the measurement result value does not change for more than 10 minutes. Measuring standards for large-scale integrated abatement facilities are also applied in the same way as individual treatment facilities.

- Required measurement system

The core systems of this measurement method are QMS and FT-IR. Other instruments are also necessary to improve the overall reliability of the measurement. Flow controllers used in reference materials and calibration devices must be certified by a recognized authority. Each certificate must be attached at the time of submission and FT- The IR and QMS measurement results must be calibrated using the calibration curve.


System nameRequired quantityRemarks
QMS1~2 systemsDetermination of Kr concentration in inlet and outlet of abatement facility
FT-IR2 systemsMeasures of greenhouse gas concentration to be abated at inflow and outflow of abatement facilities
Mass Flow Controller (MFC)1eaFor injecting gas (Kr) for flow measurement - calibration of certification body is required
Dilution System1 systemGas dilution device for calibration of QMS and FT-IR - Certification authority calibration required
Standard materialStandard gas (secondary standard gas or more)
Pollution prevention filter2eaA filter that can remove contaminants and moisture to protect the measuring equipment. However, a filter that can absorb gas can not be used.
Gas for flow measurement (Kr)1 cylinderGas used to measure inflow and outflow of abatement facilities (certificate required)
Dilution gas (N2 gas)1 cylinderDilution gas (99.999%) capable of diluting calibration standards

- Removal efficiency of abatement facilities (DRE)

In this guideline, the removal efficiency is calculated for each FGHG gas by integrating the total amount of FGHG gas simultaneously measured for 1 hour at the inlet and outlet of the reduction facility.

DRE =( 1- Vout / Vin)*100%

– Vin: Total amount of FGHG gas (SL-Standard Liter)
– Vout : Total amount of FGHG gas (SL – Standard Liter) discharged to the abatement facility during 1 hour of normal operation.


- Flow measurement and isepa-s

In conclusion, the efficiency measurement of a greenhouse gas reduction system is made up of a combination of FT-IR, which measures the amount of greenhouse gases, and a QMS system, which measures the total flow including the gas.
For example, if a 90% reduction in greenhouse gas emissions is measured, but a 10-fold increase in dilution, only a 9% reduction will be unacceptable. The carrier gas used for the dilution measurement is gas (typically Kr) which can be used in the entire process or not as a by-product. That is why we use QMS, which allows us to measure monomolecular gas. However, on-line real-time measurement is impossible with RGA systems using existing QMS systems.
Isepa-s is a real-time, fully automated real-time analysis system that solves the above problems. It is a dedicated measurement system that meets the current Ministry of Environment guidelines.


In addition, we are confident that user-friendly UI, fully automated measurement software, portable design for portable use, thorough after-sales management including after-sales service will greatly enhance measurement reliability.